@article{Biance_2006_Fib,
author = {Biance, AL and Gierak, J and Bourhis, E and Madouri, A and Lafosse, X and Patriarche, G and Oukhaled, G and Ulysse, C and Galas, JC and Chen, Y and Auvray, L},
title = {Focused ion beam sculpted membranes for nanoscience tooling},
journal = {Microelectron. Eng.},
year = {2006},
volume = {83},
number = {4-9},
month = {Jan},
}