@article{Galas_2004_Fot,
author = {Galas, JC and Belier, B and Aassime, A and Palomo, J and Bouville, D and Aubert, J},
title = {Fabrication of three-dimensional microstructures using standard ultraviolet and electron-beam lithography},
journal = {J. Vac. Sci. Technol. B},
year = {2004},
volume = {22},
number = {3},
month = {Jan},
}